Program: QS-CH AL/Poly Q90 512x512
File: XRTPRG-1502
Author: KOTOKU, Junichi
Loops: 1
Duration: :04:00:07.5
Size: 226. M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
subr-1 |
4 |
:01:00.0 |
:04:00:00.0 |
226. M |
|||||
|
1.1 |
Al/poly Q90 512x512 |
60 |
:01:00.0 |
:01:00:00.0 |
56.6 M |
|||||
|
1.1.1 |
Al/Poly (Thick-Al) - 1x1 - 16384ms |
:14.0 |
:19.1 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
3 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
35E7: Al/Poly (Thick-Al) - 1x1 - 16384ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |