Program: AR - Al/poly + Thin-Be - 60s cad - 1x1 512FOV AEC1 -- context + align (45min cad)-twice
File: XRTPRG-1519
Author: SHIN, Junho
Loops: 3
Duration: :02:15:22.5
Size: 181. M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:02.0 |
:30:00.0 |
56.6 M |
|||||
|
1.1 |
AR - Al/poly+Thin-Be- 1x1 - Q90 - 512x512 - AEC |
30 |
:01:00.0 |
:30:00.0 |
56.6 M |
|||||
|
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 2048ms |
:02.0 |
:04.7 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Thin-Be (Med-Be) - 1x1 - 4096ms |
:02.0 |
:09.8 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
1 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-2 |
1 |
:15:00.0 |
:15:00.0 |
4.01 M |
|||||
|
2.1 |
Ti/Poly FS 4096ms + G-band 512FOV 16ms - 2x2 Q90 |
1 |
:04.0 |
:17.7 |
4.01 M |
|||||
|
2.1.1 |
Ti/Poly - 2x2 - 4096ms |
:02.0 |
:14.3 |
3.77 M |
h=1024 v=1024 w=2048 h=2048 |
30% |
0 |
KSC, SSOC |
Regular |
|
|
2.1.2 |
G-Band - 2x2 - 16ms |
:02.0 |
:03.3 |
235. K |
h=1024 v=1024 w=512 h=512 |
30% |
0 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
35E3: Al/poly (Thick-Al) - 1x1 - 2048ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2048 (21) |
Observation |
1x1 |
|
353D: Thin-Be (Med-Be) - 1x1 - 4096ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |
|
370B: Ti/Poly - 2x2 - 4096ms |
Open |
Ti/Polyimide |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
4096 (23) |
Observation |
2x2 |
|
371A: G-Band - 2x2 - 16ms |
Open |
G-band |
Open |
G-band |
Open |
Safe |
Normal |
16 (7) |
Observation |
2x2 |