Program: QS-CH Study JOP204 (Al/poly, Ti/poly, Thin Be)
File: XRTPRG-151D
Author: BANDO, Takamasa
Loops: 2
Duration: :01:06:20.7
Size: 73.2 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
60 |
:30.0 |
:32:19.0 |
28.3 M |
|||||
|
1.1 |
Al/poly 1x1 8sec Q90 FOV256 |
1 |
:04.0 |
:09.8 |
235. K |
|||||
|
1.1.1 |
Al/Poly - 1x1 - 8192ms |
:02.0 |
:09.8 |
235. K |
h=1024 v=1024 w=256 h=256 |
30% |
0 |
KSC, SSOC |
Regular |
|
|
1.2 |
Ti/poly 1x1 16sec Q90 FOV256 |
1 |
:04.0 |
:22.5 |
235. K |
|||||
|
1.2.1 |
Ti/Poly - 1x1 - 16384ms |
:02.0 |
:22.5 |
235. K |
h=1024 v=1024 w=256 h=256 |
30% |
0 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-2 |
1 |
:02.0 |
:15.4 |
7.23 M |
|||||
|
2.1 |
Al/poly 2x2 8sec DPCM FOV2048 |
1 |
:04.0 |
:15.4 |
7.23 M |
|||||
|
2.1.1 |
Al/poly (Thick-Al) - 2x2 - 8192ms |
:02.0 |
:15.4 |
7.23 M |
h=1024 v=1024 w=2048 h=2048 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
3 |
Subr-3 |
1 |
:02.0 |
:28.3 |
1.06 M |
|||||
|
3.1 |
Thin Be 1x1 23sec Q90 FOV768x384 |
1 |
:04.0 |
:28.3 |
1.06 M |
|||||
|
3.1.1 |
Thin-Be - 1x1 - 23142ms |
:02.0 |
:28.3 |
1.06 M |
h=1024 v=1024 w=768 h=384 |
30% |
0 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
36B5: Al/Poly - 1x1 - 8192ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Normal |
8192 (25) |
Observation |
1x1 |
|
3613: Ti/Poly - 1x1 - 16384ms |
Open |
Ti/Polyimide |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |
|
3642: Al/poly (Thick-Al) - 2x2 - 8192ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
8192 (25) |
Observation |
2x2 |
|
36D6: Thin-Be - 1x1 - 23142ms |
Thin-Be |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
23142 (28) |
Observation |
1x1 |