Program: CH (Al/poly) - 16s exp - FOV512 -Q90
File: XRTPRG-152E
Author: LEE, Jin-Yi
Loops: Indefinite
Duration: :01:37.5
Size: 943. K

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:01:30.0

943. K

1.1

CH (Al/poly) - 16s exp - FOV512 - Q90

1

:01:30.0

:01:30.0

943. K

1.1.1

Al/poly (C/Poly) - 1x1 - 16384ms

:02.0

:19.1

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

352C: Al/poly (C/Poly) - 1x1 - 16384ms

Thin-Al/Polyimide

Open

C/Poly

Open

Close

Safe

Normal

16384 (27)

Observation

1x1