Program: CH (Al/poly) - 16s exp - FOV512 -Q90
File: XRTPRG-152E
Author: LEE, Jin-Yi
Loops: Indefinite
Duration: :01:37.5
Size: 943. K
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-1 |
1 |
:02.0 |
:01:30.0 |
943. K |
|||||
1.1 |
CH (Al/poly) - 16s exp - FOV512 - Q90 |
1 |
:01:30.0 |
:01:30.0 |
943. K |
|||||
1.1.1 |
Al/poly (C/Poly) - 1x1 - 16384ms |
:02.0 |
:19.1 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
0 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
352C: Al/poly (C/Poly) - 1x1 - 16384ms |
Thin-Al/Polyimide |
Open |
C/Poly |
Open |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |