Program: AR - Al/poly + Ti/poly - Q90 - 1x1 - 256FOV with context
File: XRTPRG-1536
Author: LEE, Jin-Yi
Loops: Indefinite
Duration: :01:00:15.7
Size: 15.0 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:02.0 |
:01:00:00.0 |
14.1 M |
|||||
|
1.1 |
Al/poly + Ti/poly - 1x1 - Q90 - 256x256 - AEC1 |
30 |
:02:00.0 |
:01:00:00.0 |
14.1 M |
|||||
|
1.1.1 |
Al/poly (C/poly) - 1x1 - 256ms |
:02.0 |
:02.0 |
235. K |
h=1024 v=1024 w=256 h=256 |
30% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Ti/Poly (Thick Al) - 1x1 -1024ms |
:02.0 |
:07.1 |
235. K |
h=1024 v=1024 w=256 h=256 |
30% |
1 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-2 |
1 |
:02.0 |
:08.2 |
943. K |
|||||
|
2.1 |
Al/poly Q90 512x512 AEC1 |
1 |
:04.0 |
:08.2 |
943. K |
|||||
|
2.1.1 |
Al/poly (C/poly) - 1x1 - 1024ms |
:02.0 |
:08.2 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
1 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
3530: Al/poly (C/poly) - 1x1 - 256ms |
Thin-Al/Polyimide |
Open |
C/Poly |
Open |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |
|
3647: Ti/Poly (Thick Al) - 1x1 -1024ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
1024 (19) |
Observation |
1x1 |
|
3523: Al/poly (C/poly) - 1x1 - 1024ms |
Thin-Al/Polyimide |
Open |
C/Poly |
Open |
Close |
Safe |
Normal |
1024 (19) |
Observation |
1x1 |