Program: AR - Al/poly + Thin-Be - 1x1 512FOV AEC1-2
File: XRTPRG-154F
Author: SAKAO, Taro
Loops: Indefinite
Duration: :02:00:07.5
Size: 56.6 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:02.0 |
:02:00:00.0 |
56.6 M |
|||||
|
1.1 |
AR - Al/poly+Thin-Be- 1x1 - Q90 - 512x512 - AEC |
30 |
:04:00.0 |
:02:00:00.0 |
56.6 M |
|||||
|
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 2048ms |
:02.0 |
:04.7 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Thin-Be (Med-Be) - 1x1 - 4096ms |
:02.0 |
:09.8 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
1 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
35E3: Al/poly (Thick-Al) - 1x1 - 2048ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2048 (21) |
Observation |
1x1 |
|
353D: Thin-Be (Med-Be) - 1x1 - 4096ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |