Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

6

:02.0

:01:36:00.0

22.6 M

1.1

Al/poly + Ti/poly + Thin-Be - 1x1 - Q90 - 256x256 - AEC1

5

:03:00.0

:15:00.0

3.53 M

1.1.1

Al/poly (C/poly) - 1x1 - 256ms

:02.0

:02.0

235. K

h=1024 v=1024 w=256 h=256

30%

1

KSC, SSOC

Regular

1.1.2

Ti/Poly (Thick Al) - 1x1 -1024ms

:02.0

:07.1

235. K

h=1024 v=1024 w=256 h=256

30%

1

KSC, SSOC

Regular

1.1.3

Thin-Be (med-Be) - 1x1 - 11571ms

:02.0

:20.6

235. K

h=1024 v=1024 w=256 h=256

30%

1

KSC, SSOC

Regular

1.2

G-band Q90 2x2 512x512 16ms

1

:01:00.0

:01:00.0

235. K

1.2.1

G-Band - 2x2 - 16ms

:02.0

:10.8

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:09.7

943. K

2.1

Al/poly Q90 512x512 AEC1

1

:04.0

:09.7

943. K

2.1.1

Al/poly (C/poly) - 1x1 - 1024ms

:02.0

:09.7

943. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

3530: Al/poly (C/poly) - 1x1 - 256ms

Thin-Al/Polyimide

Open

C/Poly

Open

Close

Safe

Normal

256 (15)

Observation

1x1

3647: Ti/Poly (Thick Al) - 1x1 -1024ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

1024 (19)

Observation

1x1

3655: Thin-Be (med-Be) - 1x1 - 11571ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

11571 (26)

Observation

1x1

371A: G-Band - 2x2 - 16ms

Open

G-band

Open

G-band

Open

Safe

Normal

16 (7)

Observation

2x2

3523: Al/poly (C/poly) - 1x1 - 1024ms

Thin-Al/Polyimide

Open

C/Poly

Open

Close

Safe

Normal

1024 (19)

Observation

1x1