Program: Al/poly+Ti/poly-384x384-AEC4-8min-cadence
File: XRTPRG-1602
Author: ISHIBASHI, Bish
Loops: Indefinite
Duration: :08:07.5
Size: 2.03 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:08:00.0 |
:08:00.0 |
2.03 M |
|||||
|
1.1 |
Al/poly(11s)+Ti/poly(16s)-384x384-Q98-(AEC4) |
1 |
:04:00.0 |
:04:00.0 |
2.03 M |
|||||
|
1.1.1 |
Al/poly - 1x1 - 11571ms |
:02:00.0 |
:02:00.0 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
4 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Ti/Poly - 1x1 - 16384ms |
:02:00.0 |
:02:00.0 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
4 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
374D: Al/poly - 1x1 - 11571ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |
|
3613: Ti/Poly - 1x1 - 16384ms |
Open |
Ti/Polyimide |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |