Program: Al/poly+Ti/poly + Dark - 384x384 - AEC1 - Q95 - 1mincad
File: XRTPRG-162C
Author: SHIMOJO, Masumi
Loops: Indefinite
Duration: :30:17.8
Size: 47.2 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:02.0 |
:30:10.3 |
47.2 M |
|||||
|
1.1 |
Al/poly - 384x384 - 12s - Q95 - dark |
1 |
:04.0 |
:10.3 |
774. K |
|||||
|
1.1.1 |
Al/poly - 1x1 - 8192ms - Dark |
:02.0 |
:10.3 |
774. K |
h=1024 v=1024 w=384 h=384 |
43% |
0 |
KSC, SSOC |
Regular |
|
|
1.2 |
Al/poly+Ti/poly-384x384-Q95-1mincad |
30 |
:01:00.0 |
:30:00.0 |
46.4 M |
|||||
|
1.2.1 |
Al/poly (Thick-Al) - 1x1 - 8192ms |
:30.0 |
:30.0 |
774. K |
h=1024 v=1024 w=384 h=384 |
43% |
1 |
KSC, SSOC |
Regular |
|
|
1.2.2 |
Ti/Poly (Thick-Al) - 1x1 - 11571ms |
:30.0 |
:30.0 |
774. K |
h=1024 v=1024 w=384 h=384 |
43% |
1 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
3500: Al/poly - 1x1 - 8192ms - Dark |
Thin-Al/Polyimide |
Open |
C/Poly |
Open |
Close |
Safe |
Dark |
8192 (25) |
Observation |
1x1 |
|
35E4: Al/poly (Thick-Al) - 1x1 - 8192ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
8192 (25) |
Observation |
1x1 |
|
3677: Ti/Poly (Thick-Al) - 1x1 - 11571ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |