Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

30

:25.0

:12:30.0

23.2 M

1.1

Al/poly - 384x384 - 2s - Q95 - AEC4

1

:02.0

:04.2

774. K

1.1.1

Al/poly (Thick-Al) - 1x1 - 2048ms

:02.0

:04.2

774. K

h=1024 v=1024 w=384 h=384

43%

4

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:01:50.6

4.94 M

2.1

Ti/poly + Thin-Be - 1x1 - Q95 - 384x384 - AEC4

2

:04.0

:01:50.6

4.94 M

2.1.1

Ti/Poly (Thick-Al) - 1x1 - 2048ms

:02.0

:08.7

774. K

h=1024 v=1024 w=384 h=384

43%

4

KSC, SSOC

Regular

2.1.2

Thin-Be (med-Be) - 1x1 - 11571ms

:02.0

:21.2

774. K

h=1024 v=1024 w=384 h=384

43%

4

KSC, SSOC

Regular

2.1.3

Thin-Be - 1x1 - 23142ms - dark

:02.0

:25.3

921. K

h=1024 v=1024 w=384 h=384

52%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35E3: Al/poly (Thick-Al) - 1x1 - 2048ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

2048 (21)

Observation

1x1

3744: Ti/Poly (Thick-Al) - 1x1 - 2048ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

2048 (21)

Observation

1x1

3655: Thin-Be (med-Be) - 1x1 - 11571ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

11571 (26)

Observation

1x1

37A7: Thin-Be - 1x1 - 23142ms - dark

Thin-Be

Open

Thin-Be

Open

Close

Safe

Dark

23142 (28)

Observation

1x1