Program: DEM analysis - DPCM - 1x1 - 384x384
File: XRTPRG-16A3
Author: LEE, Jin-Yi
Loops: 1
Duration: :05:21.8
Size: 15.1 M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-1 |
1 |
:02.0 |
:05:08.5 |
14.2 M |
|||||
1.1 |
Al/mesh - DPCM 1x1 - 384x384 short(64ms)/long(512ms) |
1 |
:04.0 |
:04.9 |
2.03 M |
|||||
1.1.1 |
Al/Mesh - 1x1 - 64ms |
:02.0 |
:02.2 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.1.2 |
Al/Mesh - 1x1 - 512ms |
:02.0 |
:02.6 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.2 |
Al/poly - DPCM 1x1 - 384x384 - short(128ms)/long(1024ms) |
1 |
:04.0 |
:08.5 |
2.03 M |
|||||
1.2.1 |
Al/Poly - 1x1 - 128ms |
:02.0 |
:05.3 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.2.2 |
Al/poly - 1x1 - 1024ms |
:02.0 |
:03.2 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.3 |
C/poly - DPCM 1x1 - 384x384 short(181ms) / long (1443ms) |
1 |
:04.0 |
:07.4 |
2.03 M |
|||||
1.3.1 |
C/poly - 1x1 - 181ms |
:02.0 |
:03.8 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.3.2 |
C/poly - 1x1 - 1443ms |
:02.0 |
:03.6 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC |
Regular |
|
1.4 |
Al/poly+Ti/poly - DPCM 1x1 - 384x384 - short(256ms)/long(2048ms) |
1 |
:04.0 |
:11.1 |
2.03 M |
|||||
1.4.1 |
Al/poly+Ti/Poly (Al/poly+Thick-Al) - 1x1 - 256ms |
:02.0 |
:06.9 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.4.2 |
Al/Poly+Ti/Poly (Al/Poly+Thick-Al) - 1x1 - 2048ms |
:02.0 |
:04.2 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.5 |
Thin-be - DPCM 1x1 - 384x384 short(4096ms) / long (11571ms) |
1 |
:04.0 |
:26.0 |
2.03 M |
|||||
1.5.1 |
Thin-Be - 1x1 - 4096ms |
:02.0 |
:12.2 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.5.2 |
Thin-Be - 1x1 - 11571ms |
:02.0 |
:13.7 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC |
Regular |
|
1.6 |
Thick filters - DPCM 1x1 - 384x384 |
1 |
:04.0 |
:04:10.3 |
4.07 M |
|||||
1.6.1 |
Med-Be - 1x1 - 46284ms |
:02.0 |
:49.9 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.6.2 |
Med-Al - 1x1 - 46284ms |
:02.0 |
:49.9 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.6.3 |
Thick-Al - 1x1 - 65536ms |
:02.0 |
:01:21.2 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.6.4 |
Thick-Be - 1x1 - 65536 |
:02.0 |
:01:09.2 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
2 |
Subr-2 |
1 |
:02.0 |
:05.8 |
921. K |
|||||
2.1 |
G-Band Alignment - 1x1 - 384FOV |
1 |
:04.0 |
:05.8 |
921. K |
|||||
2.1.1 |
G-Band - 1x1 - 64ms |
:02.0 |
:05.8 |
921. K |
h=1024 v=1024 w=384 h=384 |
52% |
0 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
369F: Al/Mesh - 1x1 - 64ms |
Open |
Thin-Al/Mesh |
Open |
Thin-Al/Mesh |
Close |
Safe |
Normal |
64 (11) |
Observation |
1x1 |
358A: Al/Mesh - 1x1 - 512ms |
Open |
Thin-Al/Mesh |
Open |
Thin-Al/Mesh |
Close |
Safe |
Normal |
512 (17) |
Observation |
1x1 |
37D9: Al/Poly - 1x1 - 128ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Normal |
128 (13) |
Observation |
1x1 |
3521: Al/poly - 1x1 - 1024ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Normal |
1024 (19) |
Observation |
1x1 |
37D7: C/poly - 1x1 - 181ms |
C/Poly |
Open |
C/Poly |
Open |
Close |
Safe |
Normal |
181 (14) |
Observation |
1x1 |
37D8: C/poly - 1x1 - 1443ms |
C/Poly |
Open |
C/Poly |
Open |
Close |
Safe |
Normal |
1443 (20) |
Observation |
1x1 |
35F1: Al/poly+Ti/Poly (Al/poly+Thick-Al) - 1x1 - 256ms |
Thin-Al/Polyimide |
Ti/Polyimide |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |
3682: Al/Poly+Ti/Poly (Al/Poly+Thick-Al) - 1x1 - 2048ms |
Thin-Al/Polyimide |
Ti/Polyimide |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2048 (21) |
Observation |
1x1 |
36BB: Thin-Be - 1x1 - 4096ms |
Thin-Be |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |
37DA: Thin-Be - 1x1 - 11571ms |
Thin-Be |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |
3711: Med-Be - 1x1 - 46284ms |
Medium-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
46284 (30) |
Observation |
1x1 |
365B: Med-Al - 1x1 - 46284ms |
Medium-Al |
Open |
Medium-Al |
Open |
Close |
Safe |
Normal |
46284 (30) |
Observation |
1x1 |
37DB: Thick-Al - 1x1 - 65536ms |
Open |
Thick-Al |
Open |
Thick-Al |
Close |
Safe |
Normal |
65536 (31) |
Observation |
1x1 |
37DC: Thick-Be - 1x1 - 65536 |
Open |
Thick-Be |
Open |
Thick-Be |
Close |
Safe |
Normal |
65536 (31) |
Observation |
1x1 |
3605: G-Band - 1x1 - 64ms |
Open |
G-band |
Open |
G-band |
Open |
Safe |
Normal |
64 (11) |
Observation |
1x1 |