Program: AR Standard-B(Morphology) for FW1=Open, 384x384 at 1064 1048, 10sec-cad
File: XRTPRG-17EE
Author: KANO, Ryouhei
Loops: Indefinite
Duration: :41:13.7
Size: 196. M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-B |
1 |
:02.0 |
:01:06.2 |
10.2 M |
|||||
1.1 |
G-Band Alignment - 1x1 - 384FOV - 1064 1048 |
1 |
:02.0 |
:02.8 |
921. K |
|||||
1.1.1 |
G-Band - 1x1 - 64ms |
:02.0 |
:02.8 |
921. K |
h=1064 v=1048 w=384 h=384 |
52% |
0 |
KSC, SSOC |
Regular |
|
1.2 |
Al/Mesh(Ti/Poly), Ti/Poly(Thick-Al) and Thick-Al(Thick-Be)-384FOV-AEC3- 1064x1048 |
4 |
:02.0 |
:01:03.3 |
9.29 M |
|||||
1.2.1 |
Al/Mesh (Ti/poly) - 1x1 - 256ms |
:02.0 |
:05.4 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
|
1.2.2 |
Ti/Poly (Thick Al) - 1x1 - 512ms |
:02.0 |
:04.1 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
|
1.2.3 |
Thick-Al (Thick-Be) - 1x1 - 1024ms |
:02.0 |
:06.2 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
|
2 |
Subr-A |
1 |
:02.0 |
:40:00.0 |
185. M |
|||||
2.1 |
Ti/Poly (Thick-Al) - 384FOV - AEC3 - 1064 1048 |
240 |
:10.0 |
:40:00.0 |
185. M |
|||||
2.1.1 |
Ti/Poly (Thick Al) - 1x1 - 256ms |
:02.0 |
:05.4 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
3605: G-Band - 1x1 - 64ms |
Open |
G-band |
Open |
G-band |
Open |
Safe |
Normal |
64 (11) |
Observation |
1x1 |
360E: Al/Mesh (Ti/poly) - 1x1 - 256ms |
Open |
Thin-Al/Mesh |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |
352F: Ti/Poly (Thick Al) - 1x1 - 512ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
512 (17) |
Observation |
1x1 |
3853: Thick-Al (Thick-Be) - 1x1 - 1024ms |
Open |
Thick-Al |
Open |
Thick-Be |
Close |
Safe |
Normal |
1024 (19) |
Observation |
1x1 |
353A: Ti/Poly (Thick Al) - 1x1 - 256ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |