Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:10:00.0

:10:00.0

344. K

1.1

Al/Poly (Thick-Al) - 512FOV - 2x2 - AEC3 - 1064 1048-

1

:02.0

:02.0

344. K

1.1.1

Al/poly (Thick-Al) - 2x2 - 256ms

:02.0

:02.0

344. K

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35F4: Al/poly (Thick-Al) - 2x2 - 256ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

256 (15)

Observation

2x2