Program: AR Al/Poly 45s cadence
File: XRTPRG-181F
Author: KOBELSKI, Adam
Loops: Indefinite
Duration: :52.5
Size: 1.11 M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-A |
1 |
:02.0 |
:45.0 |
1.11 M |
|||||
1.1 |
AR Evolution (Al/poly fall to Al/Poly+thick-Al)-Q90 |
1 |
:45.0 |
:45.0 |
1.11 M |
|||||
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 256ms |
:02.0 |
:02.9 |
1.11 M |
h=1064 v=1048 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
35D4: Al/poly (Thick-Al) - 1x1 - 256ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |