Program: Support EIS DEM with PFB, FW1=Open, 384x384 at 1064 1048, 60s cad
File: XRTPRG-1822
Author: LEE, Jin-Yi
Loops: Indefinite
Duration: :34:43.2
Size: 57.5 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:22.9

1.84 M

1.1

G-band and Dark (16sec) - 384x384 - 1064 1048 - Q98

1

:02.0

:22.9

1.84 M

1.1.1

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

:02.0

:18.5

921. K

h=1064 v=1048 w=384 h=384

52%

0

KSC, SSOC

Regular

1.1.2

G-Band - 1x1 - 64ms

:02.0

:04.3

921. K

h=1064 v=1048 w=384 h=384

52%

0

KSC, SSOC

Regular

2

Subr-B

3

:02.0

:34:12.8

55.7 M

2.1

Ti/poly (Thick-Al) AEC3 Thick-Al (Thick-Be) 32s AEC0- 384FOV - 1064 1048

2

:02.0

:01:24.2

3.09 M

2.1.1

Ti/Poly (Thick Al) - 1x1 - 512ms

:02.0

:04.1

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2.1.2

Thick-Al (Thick-Be) - 1x1 - 32768ms

:02.0

:37.9

774. K

h=1064 v=1048 w=384 h=384

43%

0

KSC, SSOC

Regular

2.2

PFB-Al/Mesh-Ti/Poly-1x1-384x384-AEC3-Q95-at_1064-1048

10

:01:00.0

:10:00.0

15.4 M

2.2.1

Al/Mesh (Thick-Al) - 1x1 - 512ms

:02.0

:07.1

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2.2.2

Ti/Poly (Thick Be) - 1x1 -1024ms

:02.0

:04.7

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2.2.3

Al/Mesh (Thick-Al) - 1x1 - 512ms

:02.0

:04.1

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-1

2.2.4

Ti/Poly (Thick Be) - 1x1 -1024ms

:02.0

:04.7

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-1

2.2.5

Al/Mesh (Thick-Al) - 1x1 - 512ms

:02.0

:04.1

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-2

2.2.6

Ti/Poly (Thick Be) - 1x1 -1024ms

:02.0

:04.7

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-2

2.2.7

Al/Mesh (Thick-Al) - 1x1 - 512ms

:02.0

:04.1

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-3

2.2.8

Ti/Poly (Thick Be) - 1x1 -1024ms

:02.0

:04.7

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-3

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

36E3: Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Dark

16384 (27)

Observation

1x1

3605: G-Band - 1x1 - 64ms

Open

G-band

Open

G-band

Open

Safe

Normal

64 (11)

Observation

1x1

352F: Ti/Poly (Thick Al) - 1x1 - 512ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

386B: Thick-Al (Thick-Be) - 1x1 - 32768ms

Open

Thick-Al

Open

Thick-Be

Close

Safe

Normal

32768 (29)

Observation

1x1

3743: Al/Mesh (Thick-Al) - 1x1 - 512ms

Open

Thin-Al/Mesh

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

3852: Ti/Poly (Thick Be) - 1x1 -1024ms

Open

Ti/Polyimide

Open

Thick-Be

Close

Safe

Normal

1024 (19)

Observation

1x1