Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:02.4

774. K

1.1

Al/poly + Ti/poly - 1x1 - Q95 - 384x384 - AEC3 1064 1048

1

:02.0

:02.4

774. K

1.1.1

Al/poly+Ti/Poly (Al/poly+Thick-Al) - 1x1 - 256ms

:02.0

:02.4

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2

Subr-B

60

:01:00.0

:01:00:00.0

46.4 M

2.1

Al/Poly (Al/Poly + Ti/poly) - 384x384FOV - AEC3 - 1064 1048 - With PFB

1

:02.0

:17.4

774. K

2.1.1

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:05.4

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2.1.2

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:04.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-1

2.1.3

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:04.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-2

2.1.4

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:04.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-3

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35F1: Al/poly+Ti/Poly (Al/poly+Thick-Al) - 1x1 - 256ms

Thin-Al/Polyimide

Ti/Polyimide

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

256 (15)

Observation

1x1

35D4: Al/poly (Thick-Al) - 1x1 - 256ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

256 (15)

Observation

1x1