Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:30.0

:34.9

1.01 M

1.1

Thin-Be-FOV384x384 AEC2

1

:02.0

:34.9

1.01 M

1.1.1

Thin-be (Med-be) - 1x1 32768ms

:02.0

:34.9

1.01 M

h=1064 v=1024 w=384 h=384

57%

2

KSC, SSOC

Regular

2

Subr-B

5

:02.0

:01:46.2

3.87 M

2.1

Ti/Poly (Thick-Al) - 384FOV - AEC1-1064 1048

1

:02.0

:21.2

774. K

2.1.1

Ti/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:21.2

774. K

h=1064 v=1024 w=384 h=384

43%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

3687: Thin-be (Med-be) - 1x1 32768ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

32768 (29)

Observation

1x1

3677: Ti/Poly (Thick-Al) - 1x1 - 11571ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1