Program: AR High Cadence for SOT bakeout -Ti/pole - 15 sec
File: XRTPRG-1894
Author: SHIMOJO, Masumi
Loops: Indefinite
Duration: :45:48.6
Size: 255. M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-A |
1 |
:02.0 |
:41.1 |
7.40 M |
|||||
1.1 |
G-band and Dark (16sec) - 512x512 - 1064 1048 - Q98 |
1 |
:02.0 |
:24.0 |
3.27 M |
|||||
1.1.1 |
Ti/Poly (Thick Al) - 1x1 - 16384ms - dark |
:02.0 |
:19.1 |
1.63 M |
h=1064 v=1048 w=512 h=512 |
52% |
0 |
KSC, SSOC |
Regular |
|
1.1.2 |
G-Band - 1x1 - 64ms |
:02.0 |
:04.9 |
1.63 M |
h=1064 v=1048 w=512 h=512 |
52% |
0 |
KSC, SSOC |
Regular |
|
1.2 |
Al/Mesh (Ti/ploy), Ti/Poly (Thick-Al), Thick-Al, - 512FOV - 1064 1048 - AEC1 |
1 |
:02.0 |
:17.1 |
4.12 M |
|||||
1.2.1 |
Al/Mesh (Ti/poly) - 1x1 - 128 ms |
:02.0 |
:05.8 |
1.37 M |
h=1064 v=1048 w=512 h=512 |
43% |
1 |
KSC, SSOC |
Regular |
|
1.2.2 |
Ti/Poly (Thick Al) - 1x1 - 256ms |
:02.0 |
:04.4 |
1.37 M |
h=1064 v=1048 w=512 h=512 |
43% |
1 |
KSC, SSOC |
Regular |
|
1.2.3 |
Thick-Al - 1x1 - 1024ms |
:02.0 |
:06.7 |
1.37 M |
h=1064 v=1048 w=512 h=512 |
43% |
1 |
KSC, SSOC |
Regular |
|
2 |
Subr-B |
1 |
:02.0 |
:45:00.0 |
247. M |
|||||
2.1 |
Ti/Poly (Thick Al) - 512FOV - AEC3 - 1064 1048 |
180 |
:15.0 |
:45:00.0 |
247. M |
|||||
2.1.1 |
Ti/Poly (Thick Al) - 1x1 - 512ms |
:02.0 |
:06.2 |
1.37 M |
h=1064 v=1048 w=512 h=512 |
43% |
3 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
36E3: Ti/Poly (Thick Al) - 1x1 - 16384ms - dark |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Dark |
16384 (27) |
Observation |
1x1 |
3605: G-Band - 1x1 - 64ms |
Open |
G-band |
Open |
G-band |
Open |
Safe |
Normal |
64 (11) |
Observation |
1x1 |
3698: Al/Mesh (Ti/poly) - 1x1 - 128 ms |
Open |
Thin-Al/Mesh |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
128 (13) |
Observation |
1x1 |
353A: Ti/Poly (Thick Al) - 1x1 - 256ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |
3674: Thick-Al - 1x1 - 1024ms |
Open |
Thick-Al |
Open |
Thick-Al |
Close |
Safe |
Normal |
1024 (19) |
Observation |
1x1 |
352F: Ti/Poly (Thick Al) - 1x1 - 512ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
512 (17) |
Observation |
1x1 |